Monolithic SU-8 Microcavities for Efficient Fluorescence Collection

The fabrication of capped microstructures such as channels or cavities typically involves multiple production steps. In this work we demonstrate a fabrication procedure that enables the generation of capped monolithic microstructures of arbitrary geometry in one single exposure step. The presented method also enables the embedment of metal self-aligned surfaces for use as electrodes or mirrors. The devices furthermore demonstrate a capability of increasing fluorescent collection, as measured by an epifluorescent inverted microscope, by up to 15 fold.